规格 |
测量面对基面垂直度 |
测量面平面度或垂直度 |
基面平面度或直线度 |
|||
精度等级(微米) |
||||||
00 |
0 |
00 |
0 |
00 |
0 |
|
Sp400 |
1.6 |
2.6 |
2.4 |
3.9 |
8.0 |
13 |
Sp630 |
2.1 |
3.5 |
3.2 |
5.3 |
10.5 |
18 |
Sp1000 |
3.0 |
5.0 |
4.5 |
7.5 |
15 |
25 |
Sp1600 |
4.4 |
7.4 |
6.6 |
11.1 |
22 |
37 |
Sp2000 |
5.4 |
10.0 |
8.1 |
13.5 |
27 |
45 |